Instrumentation, Techniques, and Measurement

High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry

[+] Author Affiliations
Run Huang, Peng Su, James H. Burge

University of Arizona, College of Optical Sciences, 1630 East University Boulevard, Tucson, Arizona 85721, United States

Lei Huang, Mourad Idir

Brookhaven National Laboratory, NSLS II 50 Rutherford Drive, Upton, New York 11973-5000, United States

Opt. Eng. 54(8), 084103 (Aug 05, 2015). doi:10.1117/1.OE.54.8.084103
History: Received May 28, 2015; Accepted July 1, 2015
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Abstract.  The Software Configurable Optical Test System (SCOTS) uses deflectometry to measure surface slopes of general optical shapes without the need for additional null optics. Careful alignment of test geometry and calibration of inherent system error improve the accuracy of SCOTS to a level where it competes with interferometry. We report a SCOTS surface measurement of an off-axis superpolished elliptical x-ray mirror that achieves <1nm root-mean-square accuracy for the surface measurement with low-order term included.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Run Huang ; Peng Su ; James H. Burge ; Lei Huang and Mourad Idir
"High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry", Opt. Eng. 54(8), 084103 (Aug 05, 2015). ; http://dx.doi.org/10.1117/1.OE.54.8.084103


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