Instrumentation, Techniques, and Measurement

Laser heterodyne interferometer for the simultaneous measurement of displacement and angle using a single reference retroreflector

[+] Author Affiliations
Shijie Zhao, Haoyun Wei, Yan Li

Tsinghua University, Department of Precision Instrument, State Key Laboratory of Precision Measurement Technology and Instruments, Beijing 100084, China

Opt. Eng. 54(8), 084112 (Aug 28, 2015). doi:10.1117/1.OE.54.8.084112
History: Received April 21, 2015; Accepted August 5, 2015
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Abstract.  This paper describes the design and realization of a new type of heterodyne interferometer for simultaneously measuring displacement and angle using only one reference retroreflector. Theoretically, this interferometer has better angle accuracy compared with classical systems that employ two reference retroreflectors because it can avoid the relative displacement resulting from external factors. The optical and mechanical configurations of the proposed interferometer, which consists of a frequency-stabilized dual-frequency laser, a monolithic prism, and additional optical and electronic components, are designed and finely processed. The experimental results show that the angle accuracy of the interferometer is greater than ±0.15 arcsec in comparison with an autocollimator.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Shijie Zhao ; Haoyun Wei and Yan Li
"Laser heterodyne interferometer for the simultaneous measurement of displacement and angle using a single reference retroreflector", Opt. Eng. 54(8), 084112 (Aug 28, 2015). ; http://dx.doi.org/10.1117/1.OE.54.8.084112


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