Optical Design and Engineering

Calibrating the pupil fill balance for hypernumerical aperture lithographic objective

[+] Author Affiliations
Dawei Rui

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, No. 3888 of Dong Nanhu Road, Jingkai District, Changchun City, Jilin Province 130033, China

State Key Laboratory of Applied Optics, Changchun, Jilin 130033, China

Wei Zhang, Huaijiang Yang

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, No. 3888 of Dong Nanhu Road, Jingkai District, Changchun City, Jilin Province 130033, China

Opt. Eng. 54(9), 095103 (Sep 21, 2015). doi:10.1117/1.OE.54.9.095103
History: Received February 2, 2015; Accepted August 17, 2015
Text Size: A A A

Abstract.  Projection objectives for deep-ultraviolet lithography typically have a dual-telecentric design, and the telecentricity in object space (mask) is idealized as zero. However, for combined illumination and objective lens systems, telecentricity matching on mask can result in a dramatic change in the pupil intensity distribution. Here, we propose a method of identifying the impact of the mismatch on the pupil fill and decoupling the pupil intensity balance from the telecentricity modulation. The technique is implemented in a user-defined program, and a series of simulations for a hypernumerical aperture immersion objective under off-axis illumination conditions verifies the method.

Figures in this Article
© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Dawei Rui ; Wei Zhang and Huaijiang Yang
"Calibrating the pupil fill balance for hypernumerical aperture lithographic objective", Opt. Eng. 54(9), 095103 (Sep 21, 2015). ; http://dx.doi.org/10.1117/1.OE.54.9.095103


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.