Optical Design and Engineering

Design and fabrication of sine-top broadband gold-coated gratings

[+] Author Affiliations
Bilali Muhutijiang

University of Science and Technology of China, National Synchrotron Radiation Laboratory, No 42, South Hezuohua road, Anhui, Hefei 230029, China

Xinjiang Normal University, College of Physics and Electronics Engineering, Urumqi 830054, China

Keqiang Qiu, Xiaolong Jiang, Shaojun Fu

University of Science and Technology of China, National Synchrotron Radiation Laboratory, No 42, South Hezuohua road, Anhui, Hefei 230029, China

Opt. Eng. 54(10), 105109 (Oct 20, 2015). doi:10.1117/1.OE.54.10.105109
History: Received April 9, 2015; Accepted September 14, 2015
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Abstract.  Fabrication and testing results of sine-top, high-efficiency, broadband gold-coated gratings (BGCG) for high-power laser pulse compression applications are reported. These gratings differ from conventional metal-on-photoresist pulse compression gratings in that the gratings patterns are generated by directly etching the quartz substrate. The groove depth and duty cycle of the photoresist mask was controlled by changing photoresist thickness and adjusting exposure and development times, respectively. The duty cycle of the photoresist mask was further corrected by oxygen plasma etching. Using this method, high efficiency, sine-top, BGCG with line densities of 1740lines/mm was achieved. The average diffraction efficiency at the-1st order was 89.2% and the peak value was 90% for TM polarized light as the wavelength increases from 750 to 850 nm.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Bilali Muhutijiang ; Keqiang Qiu ; Xiaolong Jiang and Shaojun Fu
"Design and fabrication of sine-top broadband gold-coated gratings", Opt. Eng. 54(10), 105109 (Oct 20, 2015). ; http://dx.doi.org/10.1117/1.OE.54.10.105109


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