Optical Design and Engineering

Mechanism and experimental study on three-dimensional facula shaping in femtosecond laser micromachining

[+] Author Affiliations
Xuetao Pan

Shanghai University, School of Mechatronic Engineering and Automation, Yanchang Road 149, Shanghai 200072, China

Changzhou Institute of Technology, School of Electrical and Photoelectric Engineering, Tongjiang Road 299, Changzhou 213002, China

Changzhou Key Laboratory of Optoelectronic Materials and Devices, Tongjiang Road 299, Changzhou 213002, China

Dawei Tu

Shanghai University, School of Mechatronic Engineering and Automation, Yanchang Road 149, Shanghai 200072, China

Jianwen Cai

Changzhou Institute of Technology, School of Electrical and Photoelectric Engineering, Tongjiang Road 299, Changzhou 213002, China

Changzhou Key Laboratory of Optoelectronic Materials and Devices, Tongjiang Road 299, Changzhou 213002, China

Opt. Eng. 54(10), 105111 (Oct 20, 2015). doi:10.1117/1.OE.54.10.105111
History: Received June 25, 2015; Accepted September 22, 2015
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Abstract.  Because of the laser beam waist and diffraction effect of the lens, the focal spot light field in femtosecond laser microprocessing has an ellipsoidal spatial distribution. This leads to the gap between two processing layers increasing along the axial direction, and the distribution density of processing points decreasing along the horizontal direction. This directly reduces the resolution of the microprocessing, and badly affects the machining accuracy and surface quality. We established a mathematical model for three-dimensional (3-D) laser beam shaping based on the Fresnel diffraction theory and designed a kind of four-ring complex amplitude transmittance phase plate by using a global optimization algorithm and genetic algorithm to simultaneously realize transverse and axial 3-D shaping. We numerically showed that the transverse and axial gains of the focal facula after 3-D shaping are 0.77 and 0.68, respectively, where the corresponding peak energy ratio is 0.36, the transverse and axial sidelobe energies are 0.28 and 0.62, respectively, and the defocusing amount is 0.08. We also constructed a confocal/two-photon microscope system to experimentally achieve a better shaping effect in the case of femtosecond laser fabrication at a point on the thin film of a photochromic material.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Xuetao Pan ; Dawei Tu and Jianwen Cai
"Mechanism and experimental study on three-dimensional facula shaping in femtosecond laser micromachining", Opt. Eng. 54(10), 105111 (Oct 20, 2015). ; http://dx.doi.org/10.1117/1.OE.54.10.105111


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