Lasers, Fiber Optics, and Communications

Processing grating structures on surfaces of wide-bandgap semiconductors using femtosecond laser and phase mask

[+] Author Affiliations
Bo Gao, Tao Chen, Wei Cui, Jinhai Si, Xun Hou

Xi’an Jiaotong University, School of Electronics & Information Engineering, Key Laboratory for Physical Electronics and Devices of the Ministry of Education & Shaanxi Key Lab of Information Photonic Technique, Xianning West Road, Xi’an 710049, China

Cunxia Li

Xi’an University of Technology, Department of Applied Physics, Yanxiang Road 58, Xi’an 710049, China

Opt. Eng. 54(12), 126106 (Dec 09, 2015). doi:10.1117/1.OE.54.12.126106
History: Received September 19, 2015; Accepted November 9, 2015
Text Size: A A A

Abstract.  Fabrication of grating structures on surfaces of wide-bandgap semiconductors, namely silicon carbide (SiC) and gallium nitride (GaN), was achieved using a femtosecond laser and a phase mask. The phase mask was used to produce stable interference patterns from the focused femtosecond laser to form the grating structures on the bulk materials. The effects of the irradiation power and time on the Bragg grating morphology that was formed on the SiC surface were studied. By optimizing the fabrication parameters, we successfully produced grating structures with uniform periods of 1.07μm on SiC and GaN. The threshold powers necessary for grating structure formation on wide-bandgap semiconductors were investigated. It was found that the threshold powers for SiC and GaN were much smaller than those for silica glass. The reason for this difference is that the absorption of the incident laser light in SiC and GaN is a lower-order nonlinear absorption process compared to that in silica glass.

Figures in this Article
© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Bo Gao ; Tao Chen ; Wei Cui ; Cunxia Li ; Jinhai Si, et al.
"Processing grating structures on surfaces of wide-bandgap semiconductors using femtosecond laser and phase mask", Opt. Eng. 54(12), 126106 (Dec 09, 2015). ; http://dx.doi.org/10.1117/1.OE.54.12.126106


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.