Materials, Photonic Devices, and Sensors

Si-based infrared optical filters

[+] Author Affiliations
Armandas Balčytis

Swinburne University of Technology, Centre for Micro-Photonics, John Street, Hawthorn, Victoria 3122, Australia

Center for Physical Sciences and Technology, A. Goštauto 9, LT-01108 Vilnius, Lithuania

Meguya Ryu, Massimiliano Zamengo, Junko Morikawa

Tokyo Institute of Technology, Department of Organic & Polymeric Materials, 2-12-1, S8-29, Ookayama, Meguro-ku, Tokyo 152-8550, Japan

Gediminas Seniutinas

Swinburne University of Technology, Centre for Micro-Photonics, John Street, Hawthorn, Victoria 3122, Australia

Yoshiaki Nishijima

Yokohama National University, Department of Electrical and Computer Engineering, Graduate School of Engineering, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan

Yuta Hikima

Kyoto University, Department of Chemical Engineering, Graduate School of Engineering, Nishikyo-ku, Kyoto 615-8510, Japan

Raimondas Petruškevičius

Center for Physical Sciences and Technology, A. Goštauto 9, LT-01108 Vilnius, Lithuania

Saulius Juodkazis

Swinburne University of Technology, Centre for Micro-Photonics, John Street, Hawthorn, Victoria 3122, Australia

King Abdulaziz University, Center for Nanotechnology, P.O. Box 80216, Jeddah 21589, Saudi Arabia

Opt. Eng. 54(12), 127103 (Dec 14, 2015). doi:10.1117/1.OE.54.12.127103
History: Received September 27, 2015; Accepted November 10, 2015
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Abstract.  Pyramidal silicon nanospikes, termed black-Si (b-Si), with controlled height of 0.2 to 1μm, were fabricated by plasma etching over 3-in wafers and were shown to act as variable density filters in a wide range of the IR spectrum 2.5 to 20μm, with transmission and its spectral gradient dependent on the height of the spikes. Such variable density IR filters can be utilized for imaging and monitoring applications. Narrow IR notch filters were realized with gold mesh arrays on Si wafers prospective for applications in surface-enhanced IR absorption sensing and “cold materials” for heat radiation into atmospheric IR transmission window. Both types of filters for IR: spectrally variable and notch are made by simple fabrication methods.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Armandas Balčytis ; Meguya Ryu ; Gediminas Seniutinas ; Yoshiaki Nishijima ; Yuta Hikima, et al.
"Si-based infrared optical filters", Opt. Eng. 54(12), 127103 (Dec 14, 2015). ; http://dx.doi.org/10.1117/1.OE.54.12.127103


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