Quantifying height of ultraprecisely machined steps on oxygen-free electronic copper disc using Fourier-domain short coherence interferometry

Risto Montonen; Ivan Kassamakov; Edward Hæggström; Kenneth Österberg

doi:10.1117/1.OE.55.1.014103

19 January 2016 Quantifying height of ultraprecisely machined steps on oxygen-free electronic copper disc using Fourier-domain short coherence interferometry

Risto Montonen, Ivan Kassamakov, Edward Hæggström, Kenneth Österberg

Author Affiliations +

Optical Engineering, Vol. 55, Issue 1, 014103 (January 2016). https://doi.org/10.1117/1.OE.55.1.014103

Abstract

The internal shape and alignment of accelerator discs is crucial for efficient collider operation at the future compact linear collider (CLIC). We applied a calibrated custom-made Fourier-domain short coherence interferometer to measure the height of 40 and 60 μm ultraprecisely turned steps (surface roughness R_a≤25 nm, flatness ≤2 μm) on an oxygen-free electronic copper disc. The step heights were quantified to be (39.6±2.6) μm and (59.0±2.3) μm. The uncertainties are quoted at 95% confidence level and include contributions from calibration, refractive index of air, cosine error, surface roughness, and thermal expansion in comparison to standard temperature of 20°C. The results were verified by measuring the same steps using a commercial white light interferometer Veeco—NT3300. Our instrument can ensure that the accelerator discs of the CLIC are aligned within the tolerance required for efficient collider operation.

Citation Download Citation

Risto Montonen, Ivan Kassamakov, Edward Hæggström, and Kenneth Österberg "Quantifying height of ultraprecisely machined steps on oxygen-free electronic copper disc using Fourier-domain short coherence interferometry," Optical Engineering 55(1), 014103 (19 January 2016). https://doi.org/10.1117/1.OE.55.1.014103

Published: 19 January 2016

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