Instrumentation, Techniques, and Measurement

Dual-arm multiple-reflection Michelson interferometer for large multiple reflections and increased sensitivity

[+] Author Affiliations
Charles Joenathan, Youn Woonghee, Robert M. Bunch

Rose-Hulman Institute of Technology, Department of Physics and Optical Engineering, 5500 Wabash Avenue, Terre Haute, Indiana 47803, United States

Ashley Bernal

Rose-Hulman Institute of Technology, Department of Mechanical Engineering, 5500 Wabash Avenue, Terre Haute, Indiana 47803, United States

Christopher Hakoda

Pennsylvania State University, Department of Engineering Science and Mechanics, 201 Old Main, University Park, Pennsylvania 16802, United States

Opt. Eng. 55(2), 024101 (Feb 15, 2016). doi:10.1117/1.OE.55.2.024101
History: Received September 28, 2015; Accepted January 14, 2016
Text Size: A A A

Abstract.  Michelson interferometer is one of the most popular optical interferometric systems used in optical metrology. Typically, Michelson interferometers are used to measure object displacement with wavefront shapes to one half of the laser wavelength. As testing components and device sizes reduce to micro and nano size, a sensitivity of half the wavelength of light cannot be used to measure several hundred picometer displacement. Multiple-reflection interferometers have been proposed and are used to increase the sensitivity in a Michelson interferometer; however, when altering the number of reflections, the system alignment becomes cumbersome. We describe some of the problems associated with the current multiple-reflection interferometer and introduce a setup for matching path lengths to increase the resolution and allow for the reduction of the stringent requirement on the coherence length of the lasers used. Theoretically, we show that more than 1000 reflections can be achieved. Experimental results of up to 100 reflections are presented in this paper.

Figures in this Article
© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Charles Joenathan ; Ashley Bernal ; Youn Woonghee ; Robert M. Bunch and Christopher Hakoda
"Dual-arm multiple-reflection Michelson interferometer for large multiple reflections and increased sensitivity", Opt. Eng. 55(2), 024101 (Feb 15, 2016). ; http://dx.doi.org/10.1117/1.OE.55.2.024101


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.