Materials, Photonic Devices, and Sensors

Optical waveguides fabricated by nitrogen ion implantation in fused silica

[+] Author Affiliations
Chun-Xiao Liu, Rui-Lin Zheng, Wei Wei

Nanjing University of Posts and Telecommunications, School of Optoelectronic Engineering, No. 9 Wenyuan Road, Yadong New District, Nanjing 210023, Jiangsu, China

Li-Li Fu

Nanjing University of Posts and Telecommunications, College of Electronic Science and Engineering, No. 9 Wenyuan Road, Yadong New District, Nanjing 210023, Jiangsu, China

Hai-Tao Guo, Zhi-Guang Zhou, Wei-Nan Li

Xi’an Institute of Optics and Precision Mechanics, State Key Laboratory of Transient Optics and Photonics, Chinese Academy of Sciences, No. 17 Xinxi Road, New Industrial Park, Xi’an 710119, Shaanxi, China

She-Bao Lin

Baoji University of Arts and Sciences, Institute of Physics and Optoelectronics Technology, No. 44 Baoguang Road, Baoji 721007, Shaanxi, China

Opt. Eng. 55(2), 027105 (Feb 18, 2016). doi:10.1117/1.OE.55.2.027105
History: Received November 11, 2015; Accepted January 22, 2016
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Abstract.  We report on the fabrication of waveguides in fused silica using 4.5-MeV nitrogen ion implantation with a fluence of 5.0×1014  ions/cm2. The prism-coupling method was employed to measure the effective refractive indices of guiding modes at the wavelengths of 632.8 and 1539 nm. The effective refractive indices of the first few modes were higher than that of the substrate. The refractive index profiles at 632.8 and 1539 nm were reconstructed by the reflectivity calculation method. Positive index changes were induced in the waveguide layers. The end-face coupling method was used to measure the near-field light intensity distributions at the wavelength of 632.8 nm and the finite-difference beam propagation method was applied to simulate the guided mode profile at the wavelength of 1539 nm. The waveguide structures emerge as candidates for integrated photonic devices.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Chun-Xiao Liu ; Li-Li Fu ; Rui-Lin Zheng ; Hai-Tao Guo ; Zhi-Guang Zhou, et al.
"Optical waveguides fabricated by nitrogen ion implantation in fused silica", Opt. Eng. 55(2), 027105 (Feb 18, 2016). ; http://dx.doi.org/10.1117/1.OE.55.2.027105


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