Instrumentation, Techniques, and Measurement

Dynamic specular surface measurement based on color-encoded fringe reflection technique

[+] Author Affiliations
Yuxiang Wu, Huimin Yue, Jingya Yi, Mingyang Li, Yong Liu

University of Electronic Science and Technology of China, School of Optoelectronic Information, State Key Laboratory of Electronic Thin Films and Integrated Devices, No.4, Sec. 2, North Jianshe Road, Chengdu 610054, China

Opt. Eng. 55(2), 024104 (Feb 26, 2016). doi:10.1117/1.OE.55.2.024104
History: Received September 17, 2015; Accepted February 2, 2016
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Abstract.  A color-encoded fringe reflection technique is presented for dynamic specular surface measurement. Only one color-encoded fringe pattern is required in this method. In comparison with the reported dynamic specular surface measuring method (the composite fringe pattern method), the proposed color-encoded fringe technique has higher phase accuracy. The color intensity crosstalk problem between the three channels is discussed. As a result, this problem will seldom affect the phase accuracy of the proposed method. This turns out to be the main reason why the presented method can achieve a higher measuring accuracy than the existing dynamic measurement method. In addition, the proposed color-encoded fringe technique is proven to be more suitable than the existing method for the complex tested surface. The vibrating measuring experiment of a wafer proves the ability of the proposed method to achieve dynamic measurement.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Yuxiang Wu ; Huimin Yue ; Jingya Yi ; Mingyang Li and Yong Liu
"Dynamic specular surface measurement based on color-encoded fringe reflection technique", Opt. Eng. 55(2), 024104 (Feb 26, 2016). ; http://dx.doi.org/10.1117/1.OE.55.2.024104


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