Special Section on Instrumentation and Techniques for Geometrical and Mechanical Quantity Measurement

Optimal design of the laser synthetic wavelength interferometer

[+] Author Affiliations
Liping Yan, Benyong Chen

Zhejiang Sci-Tech University, Nanometer Measurement Laboratory, No. 928, Second Avenue, Xiasha High-Education Zone, Hangzhou 310018, China

Opt. Eng. 55(9), 091401 (Mar 02, 2016). doi:10.1117/1.OE.55.9.091401
History: Received December 30, 2015; Accepted February 8, 2016
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Abstract.  From the actual implementation of displacement measurement in the laser synthetic wavelength interferometer, a nonlinear error analysis model was proposed by detecting the simultaneous zero-crossing position errors of two interference signals. By using this model, periodic nonlinear errors resulting from the polarizing leakage induced by the imperfection or misalignment of the polarizing beamsplitter in the basic configuration of the interferometer were analyzed. In order to reduce periodic nonlinear errors, two optimized optical configurations of the interferometer were presented. The simulations and experiments for verifying the performance of three configurations of the interferometer were performed. The experimental results demonstrate that the optimized third configuration has good stability, with a standard deviation of about 0.7 nm.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Liping Yan and Benyong Chen
"Optimal design of the laser synthetic wavelength interferometer", Opt. Eng. 55(9), 091401 (Mar 02, 2016). ; http://dx.doi.org/10.1117/1.OE.55.9.091401


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