Instrumentation, Techniques, and Measurement

Method for reconstruction of complex surface shapes from a reflection-based non-null interferometric measurement

[+] Author Affiliations
Jason D. Micali, John E. Greivenkamp

University of Arizona, College of Optical Sciences, 1630 East University Boulevard, Tucson, Arizona 85721, United States

Opt. Eng. 55(3), 034101 (Mar 07, 2016). doi:10.1117/1.OE.55.3.034101
History: Received December 20, 2015; Accepted February 11, 2016
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Abstract.  Complex surface forms are becoming increasingly prevalent in optical designs, requiring advances in manufacturing and surface metrology to maintain the state of the art. Non-null interferometry extends the range of standard interferometers to test complex shapes without the need for complicated and expensive compensating elements. However, non-null measurements will accumulate significant retrace errors, or interferometer-induced errors, which can be difficult to isolate from surface figure errors. Methods discussed in the literature to correct for retrace errors in a reflection-based interferometer are computationally intensive and limited in spatial resolution. A method is presented for reconstructing complex surface shapes in a reflection-based non-null interferometer configuration, which is computationally efficient, easy to implement, and can produce high spatial resolution surface reconstructions. The method is verified against simulated surfaces that contain more than 200  μm of surface departure from a null configuration. Examples are provided to demonstrate the effects of measurement noise and interferometer model uncertainties, as well as an experimental validation of the method.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Jason D. Micali and John E. Greivenkamp
"Method for reconstruction of complex surface shapes from a reflection-based non-null interferometric measurement", Opt. Eng. 55(3), 034101 (Mar 07, 2016). ; http://dx.doi.org/10.1117/1.OE.55.3.034101


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