Special Section on Freeform Optics

Metrological multispherical freeform artifact

[+] Author Affiliations
Gernot Blobel, Michael Schulz

Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38114 Braunschweig, Germany

Axel Wiegmann

Physikalisch-Technische Bundesanstalt, Bundesallee 100, 38114 Braunschweig, Germany

Mahr GmbH, Carl-Zeiss-Promenade 10, 07745 Jena, Germany

Jens Siepmann

Mahr GmbH, Carl-Zeiss-Promenade 10, 07745 Jena, Germany

Opt. Eng. 55(7), 071202 (Mar 16, 2016). doi:10.1117/1.OE.55.7.071202
History: Received October 31, 2015; Accepted February 23, 2016
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Abstract.  Precisely known artifacts are required to characterize the accuracy of asphere and freeform measuring instruments. To this end the best knowledge of the surface characteristics in conjunction with a low measurement uncertainty are necessary. Because this is a challenging task for typical freeform surfaces used in optical systems, the concept of “metrological” artifacts is introduced. We have developed a multispherical freeform artifact for performance tests of tactile touch probe and contact-free optical measuring systems. The measurement accuracy of the complete form and the deviation from calibrated spherical sections can thus be determined. The radius calibration of multiple spherical sections is performed with an extended radius measuring procedure by interferometry. Evaluated surface forms of different measuring methods and the radii determined can be compared to each other. In this study, a multispherical freeform specimen made of copper, with two differing radii, has been measured by two optical measuring methods, a full field measuring tilted-wave interferometer and a high accuracy cylinder coordinate measuring machine with an optical probe. The surface form measurements are evaluated and compared, and the radii determined are compared to the results of a radius measurement bench.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Gernot Blobel ; Axel Wiegmann ; Jens Siepmann and Michael Schulz
"Metrological multispherical freeform artifact", Opt. Eng. 55(7), 071202 (Mar 16, 2016). ; http://dx.doi.org/10.1117/1.OE.55.7.071202


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