Materials, Photonic Devices, and Sensors

Ultraflat and low dispersion in a horizontal silicon nitride slot waveguide at near-infrared wavelengths

[+] Author Affiliations
Lijuan Xu, Xiaochang Ni

Tianjin University of Technology and Education, School of Electronic Engineering, No. 1310, Dagu South Road, Hexi District, Tianjin 300222, China

Bowen Liu, Yanfeng Li, Minglie Hu

Tianjin University, Ultrafast Laser Laboratory, Key Laboratory of Opto-electronic Information Technology (Ministry of Education), College of Precision Instruments and Opto-electronics Engineering, 92 Weijin Road, Nankai District, Tianjin 300072, China

Opt. Eng. 55(3), 037109 (Mar 28, 2016). doi:10.1117/1.OE.55.3.037109
History: Received January 28, 2016; Accepted March 9, 2016
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Abstract.  A strip/slot hybrid horizontal silicon nitride slot waveguide is designed to provide an ultraflat and low dispersion. By optimizing the height and width of the structure, an ultraflat and low dispersion of 0±7  ps/nm/km over 812 nm wavelength range (from 1137 to 1949 nm) can be achieved. The waveguide with a 20-nm conformal overlayer has chromatic dispersion within ±1  ps/nm/km over 682-nm bandwidth. So the flatness is 0.0015, which is the lowest flatness in near-infrared regime of this kind of waveguide to our knowledge. The influence of the waveguide sidewall to dispersion is also discussed.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Lijuan Xu ; Xiaochang Ni ; Bowen Liu ; Yanfeng Li and Minglie Hu
"Ultraflat and low dispersion in a horizontal silicon nitride slot waveguide at near-infrared wavelengths", Opt. Eng. 55(3), 037109 (Mar 28, 2016). ; http://dx.doi.org/10.1117/1.OE.55.3.037109


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