OE Letters

Improved environmental stability for plasma enhanced chemical vapor deposition SiO2 waveguides using buried channel designs

[+] Author Affiliations
Thomas A. Wall, Roger P. Chu, Aaron R. Hawkins

Brigham Young University, Electrical and Computer Engineering, 459 Clyde Building, Provo, Utah 84602, United States

Joshua W. Parks, Damla Ozcelik, Holger Schmidt

University of California, Santa Cruz, Baskin Engineering, Room 40, 1156 High Street, Santa Cruz, California 95064, United States

Opt. Eng. 55(4), 040501 (Apr 25, 2016). doi:10.1117/1.OE.55.4.040501
History: Received February 25, 2016; Accepted April 6, 2016
Text Size: A A A

Abstract.  Ridge and buried channel waveguides (BCWs) made using plasma-enhanced chemical vapor deposition SiO2 were fabricated and tested after being subjected to long 85°C water baths. The water bath was used to investigate the effects of any water absorption in the ridge and BCWs. Optical mode spreading and power throughput were measured over a period of three weeks. The ridge waveguides quickly absorbed water within the critical guiding portion of the waveguide. This caused a nonuniformity in the refractive index profile, leading to poor modal confinement after only seven days. The BCWs possessed a low index top cladding layer of SiO2, which caused an increase in the longevity of the waveguides, and after 21 days, the BCW samples still maintained 20% throughput, much higher than the ridge waveguides, which had a throughput under 5%.

Figures in this Article
© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Thomas A. Wall ; Roger P. Chu ; Joshua W. Parks ; Damla Ozcelik ; Holger Schmidt, et al.
"Improved environmental stability for plasma enhanced chemical vapor deposition SiO2 waveguides using buried channel designs", Opt. Eng. 55(4), 040501 (Apr 25, 2016). ; http://dx.doi.org/10.1117/1.OE.55.4.040501


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.