Instrumentation, Techniques, and Measurement

Interferometric characterization of geometric errors of ring cages for electrostatic suspension accelerometers

[+] Author Affiliations
Jinfeng Lu, Shanyong Chen, Ziqiang Yin

National University of Defense Technology, College of Mechatronic Engineering and Automation, 47 Yanzheng Street, Changsha, Hunan 410073, China

Opt. Eng. 55(5), 054105 (May 23, 2016). doi:10.1117/1.OE.55.5.054105
History: Received January 7, 2016; Accepted April 26, 2016
Text Size: A A A

Abstract.  The ring cage is used to suspend an inertial mass and then detect the gravity with an extremely high sensitivity for electrostatic suspension space accelerometers. Geometric errors are required to be at submicron level, which makes it challenging and expensive to machine the ring cage by means of ultraprecision grinding. We propose an alternative solution by optical machining based on interferometric characterization of the geometric error. The flatness of the internal surface is measured with a skip-flat test. To deal with the mechanical perturbation in parallelism measurement, a differential method is proposed to simultaneously cancel out the figure error and tip-tilt of the cavity. Perpendicularity of the internal surfaces is indirectly characterized by combining the internal flatness, parallelism, and perpendicularity of the external surfaces. We introduce another interferometer to monitor the parallelism of two retro-reflectors in real time and measure the perpendicularity and pyramidal error of the external surfaces simultaneously. The test procedure and data reduction are illustrated experimentally.

Figures in this Article
© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Jinfeng Lu ; Shanyong Chen and Ziqiang Yin
"Interferometric characterization of geometric errors of ring cages for electrostatic suspension accelerometers", Opt. Eng. 55(5), 054105 (May 23, 2016). ; http://dx.doi.org/10.1117/1.OE.55.5.054105


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.