Instrumentation, Techniques, and Measurement

Diamond turning of high-precision roll-to-roll imprinting molds for fabricating subwavelength gratings

[+] Author Affiliations
Chun-Wei Liu

Industrial Technology Research Institute, Mechanical and Systems Research Laboratories, 195, Section 4, Chung Hsing Road, Chutung, Hsinchu 310, Taiwan

Jiwang Yan

Keio University, Department of Mechanical Engineering, Hiyoshi 3-14-1, Kohoku-ku, Yokohama 223-8522, Japan

Shih-Chieh Lin

National Tsing Hua University, Department of Power Mechanical Engineering, 101, Section 2, Kuang-Fu Road, Hsinchu 30013, Taiwan

Opt. Eng. 55(6), 064105 (Jun 08, 2016). doi:10.1117/1.OE.55.6.064105
History: Received November 17, 2015; Accepted May 20, 2016
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Abstract.  Diamond turning of high-precision molds is a vital process for the roll-to-roll-based ultraviolet resin imprinting process in fabricating subwavelength gratings. The effects of the grating shape and grating period on diffraction efficiencies and diffraction angles were simulated. Experiments were then conducted to examine the effects of shape design, grating period, and cutting speed on machinability of the mold. According to the optical measurement results, the performance of the subwavelength gratings matched the design well at various incident angles. The results confirm that diamond turning of high-precision molds is a feasible approach for ensuring the continual mass production of subwavelength gratings.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Chun-Wei Liu ; Jiwang Yan and Shih-Chieh Lin
"Diamond turning of high-precision roll-to-roll imprinting molds for fabricating subwavelength gratings", Opt. Eng. 55(6), 064105 (Jun 08, 2016). ; http://dx.doi.org/10.1117/1.OE.55.6.064105


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