Materials, Photonic Devices, and Sensors

Study on the electrical properties of ZnO thin film transistors using pyrochlore Bi1.5Zn(1+y)Nb1.5O(7+y) gate insulators fabricated by RF sputtering

[+] Author Affiliations
Wei Ye, Wei Ren, Peng Shi

Xi’an Jiaotong University, Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education and International Center for Dielectric Research, No. 28, Xianning West Road, Xi’an, Shaanxi 710049, China

Zhuangde Jiang

Xi’an Jiaotong University, State Key Laboratory for Manufacturing Systems Engineering, Xi’an 710049, China

Opt. Eng. 55(6), 067106 (Jun 21, 2016). doi:10.1117/1.OE.55.6.067106
History: Received March 2, 2016; Accepted June 6, 2016
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Abstract.  A series of ZnO thin film transistors (TFTs) using pyrochlore Bi1.5Zn(1+y)Nb1.5O(7+y) (BZN) thin films as gate insulators by RF sputtering has been fabricated. The relations between the zinc content and performance of BZN thin films and ZnO-TFTs are studied. The electrical properties of the ZnO-TFTs with BZN gate insulators as a function of Zn content are discussed. The research results showed that excess Zn (5 mol.%) can significantly enhance the performance of BZN thin films and ZnO-TFTs, which is mainly attributed to the compensation of Zn volatility during fabrication of BZN thin films. At an applied electric field of 250  kV/cm, the leakage current density of BZN thin films with 5 mol.% excess Zn is approximately four order of magnitude lower than that of BZN thin films without excess Zn. The subthreshold and surface state density of ZnO-TFTs were decreased from 684 and 350  mV/dec to 4.5×1012 and 2×1012  cm2, respectively, as Zn content was increased.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Wei Ye ; Wei Ren ; Peng Shi and Zhuangde Jiang
"Study on the electrical properties of ZnO thin film transistors using pyrochlore Bi1.5Zn(1+y)Nb1.5O(7+y) gate insulators fabricated by RF sputtering", Opt. Eng. 55(6), 067106 (Jun 21, 2016). ; http://dx.doi.org/10.1117/1.OE.55.6.067106


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