Study on the electrical properties of ZnO thin film transistors using pyrochlore Bi1.5Zn(1+y)Nb1.5O(7+y) gate insulators fabricated by RF sputtering

Wei Ye; Wei Ren; Peng Shi; Zhuangde Jiang

doi:10.1117/1.OE.55.6.067106

21 June 2016 Study on the electrical properties of ZnO thin film transistors using pyrochlore Bi_1.5Zn_(1+y)Nb_1.5O_(7+y) gate insulators fabricated by RF sputtering

Wei Ye, Wei Ren, Peng Shi, Zhuangde Jiang

Author Affiliations +

Optical Engineering, Vol. 55, Issue 6, 067106 (June 2016). https://doi.org/10.1117/1.OE.55.6.067106

Abstract

^{A series of ZnO thin film transistors (TFTs) using pyrochlore Bi_1.5Zn_(1+y)Nb_1.5O_(7+y) (BZN) thin films as gate insulators by RF sputtering has been fabricated. The relations between the zinc content and performance of BZN thin films and ZnO-TFTs are studied. The electrical properties of the ZnO-TFTs with BZN gate insulators as a function of Zn content are discussed. The research results showed that excess Zn (5 mol.%) can significantly enhance the performance of BZN thin films and ZnO-TFTs, which is mainly attributed to the compensation of Zn volatility during fabrication of BZN thin films. At an applied electric field of 250 kV/cm, the leakage current density of BZN thin films with 5 mol.% excess Zn is approximately four order of magnitude lower than that of BZN thin films without excess Zn. The subthreshold and surface state density of ZnO-TFTs were decreased from 684 and 350 mV/dec to 4.5×10¹² and 2×10¹² cm−², respectively, as Zn content was increased.}

Citation Download Citation

Wei Ye, Wei Ren, Peng Shi, and Zhuangde Jiang "Study on the electrical properties of ZnO thin film transistors using pyrochlore Bi_1.5Zn_(1+y)Nb_1.5O_(7+y) gate insulators fabricated by RF sputtering," Optical Engineering 55(6), 067106 (21 June 2016). https://doi.org/10.1117/1.OE.55.6.067106

Published: 21 June 2016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available