Instrumentation, Techniques, and Measurement

Phase recovery of high numerical-aperture spherical surfaces in tilt phase-shift interferometry

[+] Author Affiliations
Hagyong Kihm

Korea Research Institute of Standards and Science, Center for Space Optics, 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea

Opt. Eng. 55(7), 074101 (Jul 07, 2016). doi:10.1117/1.OE.55.7.074101
History: Received April 7, 2016; Accepted June 17, 2016
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Abstract.  A phase-recovery method based on iterative least-square fitting is proposed to overcome off-axis phase-shifting errors of high numerical-aperture (NA) surfaces in tilt phase-shift interferometry. Vibration of test optics having optical powers makes nonuniform off-axis phase-shift errors over the aperture, which is severe when testing optics with high NA. The proposed method calculates the test wavefront, off-axis phase shift, and tilt phase shifts in x- and y-directions within four separate least-square fitting steps iteratively. Parabolic and linear regressions are used for extracting off-axis and tilt phase-shift errors, respectively. The proposed method is verified with simulations and experiments with a Fizeau interferometer having F/0.75 transmission sphere. This method can be used with a temporal phase-shifting interferometers for testing high-NA optics in the presence of vibration.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Hagyong Kihm
"Phase recovery of high numerical-aperture spherical surfaces in tilt phase-shift interferometry", Opt. Eng. 55(7), 074101 (Jul 07, 2016). ; http://dx.doi.org/10.1117/1.OE.55.7.074101


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