Instrumentation, Techniques, and Measurement

Swing arm profilometer: analytical solutions of misalignment errors for testing axisymmetric optics

[+] Author Affiliations
Ling Xiong, Haixiang Hu

Changchun Institute of Optics, Key Laboratory of Optical System Advanced Manufacturing Technology, Fine Mechanics and Physics, Chinese Academy of Sciences, No. 3888 Dong Nanhu Road, Changchun, Jilin 130033, China

University of Chinese Academy of Sciences, Beijing 100049, China

Xiao Luo, Zhenyu Liu, Xiaokun Wang, Feng Zhang, Ligong Zheng, Xuejun Zhang

Changchun Institute of Optics, Key Laboratory of Optical System Advanced Manufacturing Technology, Fine Mechanics and Physics, Chinese Academy of Sciences, No. 3888 Dong Nanhu Road, Changchun, Jilin 130033, China

Opt. Eng. 55(7), 074108 (Jul 20, 2016). doi:10.1117/1.OE.55.7.074108
History: Received May 24, 2016; Accepted June 30, 2016
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Abstract.  The swing arm profilometer (SAP) has been playing a very important role in testing large aspheric optics. As one of most significant error sources that affects the test accuracy, misalignment error leads to low-order errors such as aspherical aberrations and coma apart from power. In order to analyze the effect of misalignment errors, the relation between alignment parameters and test results of axisymmetric optics is presented. Analytical solutions of SAP system errors from tested mirror misalignment, arm length L deviation, tilt-angle θ deviation, air-table spin error, and air-table misalignment are derived, respectively; and misalignment tolerance is given to guide surface measurement. In addition, experiments on a 2-m diameter parabolic mirror are demonstrated to verify the model; according to the error budget, we achieve the SAP test for low-order errors except power with accuracy of 0.1  μm root-mean-square.

© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Ling Xiong ; Xiao Luo ; Zhenyu Liu ; Xiaokun Wang ; Haixiang Hu, et al.
"Swing arm profilometer: analytical solutions of misalignment errors for testing axisymmetric optics", Opt. Eng. 55(7), 074108 (Jul 20, 2016). ; http://dx.doi.org/10.1117/1.OE.55.7.074108


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