Swing arm profilometer: analytical solutions of misalignment errors for testing axisymmetric optics

Ling Xiong; Xiao Luo; Zhenyu Liu; Xiaokun Wang; Haixiang Hu; Feng Zhang; Ligong Zheng; Xuejun Zhang

doi:10.1117/1.OE.55.7.074108

20 July 2016 Swing arm profilometer: analytical solutions of misalignment errors for testing axisymmetric optics

Ling Xiong, Xiao Luo, Zhenyu Liu, Xiaokun Wang, Haixiang Hu, Feng Zhang, Ligong Zheng, Xuejun Zhang

Author Affiliations +

Optical Engineering, Vol. 55, Issue 7, 074108 (July 2016). https://doi.org/10.1117/1.OE.55.7.074108

Abstract

The swing arm profilometer (SAP) has been playing a very important role in testing large aspheric optics. As one of most significant error sources that affects the test accuracy, misalignment error leads to low-order errors such as aspherical aberrations and coma apart from power. In order to analyze the effect of misalignment errors, the relation between alignment parameters and test results of axisymmetric optics is presented. Analytical solutions of SAP system errors from tested mirror misalignment, arm length L deviation, tilt-angle θ deviation, air-table spin error, and air-table misalignment are derived, respectively; and misalignment tolerance is given to guide surface measurement. In addition, experiments on a 2-m diameter parabolic mirror are demonstrated to verify the model; according to the error budget, we achieve the SAP test for low-order errors except power with accuracy of 0.1 μm root-mean-square.

Citation Download Citation

Ling Xiong, Xiao Luo, Zhenyu Liu, Xiaokun Wang, Haixiang Hu, Feng Zhang, Ligong Zheng, and Xuejun Zhang "Swing arm profilometer: analytical solutions of misalignment errors for testing axisymmetric optics," Optical Engineering 55(7), 074108 (20 July 2016). https://doi.org/10.1117/1.OE.55.7.074108

Published: 20 July 2016

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