5 August 2016 Real-time one-point out-of-plane displacement measurement system using electronic speckle pattern interferometry
Chen Xiong, Wenxin Hu, Ming Zhang, Hong Miao
Author Affiliations +
Abstract
We propose an electronic speckle pattern interferometry-based measurement method in which a hardware device in the reference arm is used to track the out-of-plane displacement in the objective arm. We developed a real-time one-point out-of-plane displacement measurement system, which uses a Michelson interferometer, a lead zirconate titanate (PZT) device, a charge-coupled device camera, and a tracking control system. The system works by checking the movement of carrier fringes, and the PZT is used to track the displacement. We also developed an efficient tracking algorithm based on direction judgment and correlation computation to determine whether the PZT is activated and the distance that the PZT is ordered to move. Our experimental results demonstrate the effectiveness of the system, and finally, we discuss the detailed mechanism of the system.
© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2016/$25.00 © 2016 SPIE
Chen Xiong, Wenxin Hu, Ming Zhang, and Hong Miao "Real-time one-point out-of-plane displacement measurement system using electronic speckle pattern interferometry," Optical Engineering 55(12), 121721 (5 August 2016). https://doi.org/10.1117/1.OE.55.12.121721
Published: 5 August 2016
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CITATIONS
Cited by 5 scholarly publications.
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KEYWORDS
Ferroelectric materials

Speckle pattern

Interferometry

Detection and tracking algorithms

Algorithm development

Calibration

Speckle

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