Instrumentation, Techniques, and Measurement

Point-specific self-calibration for improved characterization of thickness distribution

[+] Author Affiliations
Fangfang Meng, Kun Chen, Tian Zhou, Tao Wu, Haoyun Wei, Yan Li

Tsinghua University, State Key Laboratory of Precision Measurement Technology and Instrument, Department of Precision Instruments, 30 Shuangqing Road, Beijing 100084, China

Opt. Eng. 55(8), 084102 (Aug 05, 2016). doi:10.1117/1.OE.55.8.084102
History: Received April 29, 2016; Accepted July 19, 2016
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Abstract.  This work proposes a point-specific self-calibration method to characterize film thickness distribution by exploiting the multiple detection capability of a home-built full-field ellipsometer. The self-calibration method offers a feasible route for retrieving calibration information from the actual real-time sample measurement in conjunction with the ellipsometric parameters, thus leading to error-free data after the elimination of systematic errors and addressing the problem of high time-consumption. With the help of the multiple detection capability of a full-field ellipsometer, we can further implement self-calibration for every point-specific pixel, termed as point-specific self-calibration to achieve a high-accuracy film thickness profile. The synthetic thickness distribution composed of structural-anisotropy pixels with tilted surface is utilized to demonstrate the potential of the proposed approach by retrieving the ellipsometric angles and the calibration parameters of every single pixel. A three orders-of-magnitude improvement in the accuracy of thickness determination was achieved in the simulation. To demonstrate the feasibility of the proposed approach, a SiO2 film deposited on the Si substrate is measured in this work. This approach could be easily extended to implement thickness distribution measurements accurately and rapidly in other rotating-element ellipsometer cases.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Fangfang Meng ; Kun Chen ; Tian Zhou ; Tao Wu ; Haoyun Wei, et al.
"Point-specific self-calibration for improved characterization of thickness distribution", Opt. Eng. 55(8), 084102 (Aug 05, 2016). ; http://dx.doi.org/10.1117/1.OE.55.8.084102


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