Special Section on Speckle-Based Metrology

Nanoscale measurement of in-plane and out-of-plane displacements of microscopic object by sensor fusion

[+] Author Affiliations
Alok Kumar Singh, Giancarlo Pedrini, Wolfgang Osten

University Stuttgart, Institut fuer Technische Optik, Pfaffenwaldring 9, 70569 Stuttgart, Germany

Xiang Peng

Shenzhen University, Institute of Optoelectronics, Nanhai Avenue 3688, Shenzhen, Guangdong 518060, China

Opt. Eng. 55(12), 121722 (Aug 08, 2016). doi:10.1117/1.OE.55.12.121722
History: Received March 3, 2016; Accepted July 19, 2016
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Abstract.  Different methods for the measurement of in-plane and out-of-plane nanodisplacements of microscopic samples are discussed and compared. It is shown that correlation methods are suited for in-plane displacement measurements and can achieve accuracies of a few nanometers. The method based on vortices tracking can be used for in-plane displacement measurements, but its accuracy is lower compared with the intensity correlation method. The holographic methods allow the measurement of in-plane and out-of-plane displacements at the same time; but in this case, a quite complex setup is required. A combination of correlation methods for in-plane measurement and digital holography for out-of-plane plane measurements is also discussed. The accuracy of the different methods was determined by comparison with a calibrated reference.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Alok Kumar Singh ; Giancarlo Pedrini ; Xiang Peng and Wolfgang Osten
"Nanoscale measurement of in-plane and out-of-plane displacements of microscopic object by sensor fusion", Opt. Eng. 55(12), 121722 (Aug 08, 2016). ; http://dx.doi.org/10.1117/1.OE.55.12.121722


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