Materials, Photonic Devices, and Sensors

Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator

[+] Author Affiliations
Zengzhi Huang

Huazhong University of Science and Technology, School of Optical and Electronic Information, Luoyu Road 1037, Wuhan 430074, China

Huazhong University of Science and Technology, Wuhan National Laboratory for Optoelectronics, Luoyu Road 1037, Wuhan 430074, China

Jinsong Xia

Huazhong University of Science and Technology, Wuhan National Laboratory for Optoelectronics, Luoyu Road 1037, Wuhan 430074, China

Opt. Eng. 55(8), 087102 (Aug 09, 2016). doi:10.1117/1.OE.55.8.087102
History: Received May 11, 2016; Accepted July 20, 2016
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Abstract.  Although slot waveguide structures are widely used in all kinds of optical devices, very few articles focus on the issue of optical isolation of slot waveguides. This article, in an effort to bridge the gap in the available literature, focuses on the aspect of optical isolation of slot waveguides and provides definitive rules for application of different slot waveguides in dense integration of optical links. A slot waveguide with a 48-nm-wide slot was fabricated with electron beam lithography and inductively coupled plasma etching.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Topics

Waveguides ; Silicon

Citation

Zengzhi Huang and Jinsong Xia
"Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator", Opt. Eng. 55(8), 087102 (Aug 09, 2016). ; http://dx.doi.org/10.1117/1.OE.55.8.087102


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