Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator

Zengzhi Huang; Jinsong Xia

doi:10.1117/1.OE.55.8.087102

9 August 2016 Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator

Zengzhi Huang, Jinsong Xia

Author Affiliations +

Optical Engineering, Vol. 55, Issue 8, 087102 (August 2016). https://doi.org/10.1117/1.OE.55.8.087102

Abstract

Although slot waveguide structures are widely used in all kinds of optical devices, very few articles focus on the issue of optical isolation of slot waveguides. This article, in an effort to bridge the gap in the available literature, focuses on the aspect of optical isolation of slot waveguides and provides definitive rules for application of different slot waveguides in dense integration of optical links. A slot waveguide with a 48-nm-wide slot was fabricated with electron beam lithography and inductively coupled plasma etching.

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Zengzhi Huang and Jinsong Xia "Sub-50-nm wide slot waveguides with good optical isolation on silicon on insulator," Optical Engineering 55(8), 087102 (9 August 2016). https://doi.org/10.1117/1.OE.55.8.087102

Published: 9 August 2016

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