Optical Design and Engineering

Optical constants of e-beam evaporated titanium dioxide thin films in the 25.5- to 612-eV energy region

[+] Author Affiliations
Antonela Comisso, Marco Nardello, Piergiorgio Nicolosi

University of Padova, Department of Information Engineering, via Gradenigo 6B, Padova 35131, Italy

Consiglio Nazionale delle Ricerche, Institute for Photonics and Nanotechnologies Laboratory for Ultraviolet and X-Ray Optical Research, via Trasea 7, Padova 35131, Italy

Angelo Giglia

Istituto Officina Materiali-CNR, s.s. 14 Km 163.5 in Area Science Park, Basovizza, Trieste 34149, Italy

Opt. Eng. 55(9), 095102 (Sep 14, 2016). doi:10.1117/1.OE.55.9.095102
History: Received June 19, 2016; Accepted August 22, 2016
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Abstract.  The optical constants of titanium dioxide (TiO2) have been experimentally determined at energies in the extreme ultraviolet and soft x-ray spectral regions, from 25.5 to 612 eV. Measuring angle-dependent reflectance of amorphous TiO2 thin films with synchrotron radiation at the BEAR beamline of Synchrotron ELETTRA. The experimental reflectivity profiles were fitted to the Fresnel equations using a genetic algorithm applied to a least-square curve fitting method, obtaining values for δ and β. We compared our measurements with tabulated data. All samples were grown on Si (100) substrates by the electron-beam evaporation technique, with a substrate temperature of 150°C and deposition rates of 0.3 to 0.5  /s. Complete films characterization have been carried out with structural (XRD, ellipsometry, and profilometry), compositional (x-ray photoelectron spectroscopy), and morphological (atomic force microscopy) analyses.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Antonela Comisso ; Marco Nardello ; Angelo Giglia and Piergiorgio Nicolosi
"Optical constants of e-beam evaporated titanium dioxide thin films in the 25.5- to 612-eV energy region", Opt. Eng. 55(9), 095102 (Sep 14, 2016). ; http://dx.doi.org/10.1117/1.OE.55.9.095102


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