Optical Design and Engineering

Fabrication of microhole arrays on coated silica sheet using femtosecond laser

[+] Author Affiliations
Zhuping Wang, Guoying Feng, Jinghua Han, Shutong Wang, Ruifeng Hu, Guang Li, Shenyu Dai

Sichuan University, Institute of Laser and Micro/Nano Engineering, College of Electronics and Information Engineering, No. 24 South Section 1, Yihuan Road, Chengdu, Sichuan 610065, China

Shouhuan Zhou

Sichuan University, Institute of Laser and Micro/Nano Engineering, College of Electronics and Information Engineering, No. 24 South Section 1, Yihuan Road, Chengdu, Sichuan 610065, China

North China Research Institute of Electro-Optics, No. 4 Jiuxianqiao Street, Chaoyang District, Beijing 100015, China

Opt. Eng. 55(10), 105101 (Oct 14, 2016). doi:10.1117/1.OE.55.10.105101
History: Received July 26, 2016; Accepted September 28, 2016
Text Size: A A A

Abstract.  A femtosecond (fs) laser beam machining method has been proposed to improve the quality of micromachining. At first, the coated silica sheet is prepared by pulsed laser deposition, then the coated silica is processed by the fs laser. After that, the aluminum film on a fused silica sheet is cleared out by hydrochloric acid (HCl) in a solution of 10%, and then the microhole array is formed on the silica which has better morphologies. Additionally, some mathematical models are constructed to analyze the diffusion of vapors and reflection of shock waves during the machining process. The theoretical results show that the aluminum film can effectively decrease the pressure gradient of the vapors and the reflection of shock wave pressure on the fused silica during the machining process. The simulation is consistent with experimental results. Finally, coating with a film or not has a great influence on the quality of micromachining, but the types of coating films have little influence. In a word, it is an excellent choice to improve the quality of fs laser processing by coating with a film on a fused silica sheet.

Figures in this Article
© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Zhuping Wang ; Guoying Feng ; Jinghua Han ; Shutong Wang ; Ruifeng Hu, et al.
"Fabrication of microhole arrays on coated silica sheet using femtosecond laser", Opt. Eng. 55(10), 105101 (Oct 14, 2016). ; http://dx.doi.org/10.1117/1.OE.55.10.105101


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.