Instrumentation, Techniques, and Measurement

Three-dimensional profilometry with mixed binary defocusing technique

[+] Author Affiliations
Suming Tang

Chinese Academy of Sciences, Shenzhen Institutes of Advanced Technology, Guangdong Provincial Key Laboratory of Robotics and Intelligent System, Guangdong 518055, China

Shanghai University, School of Mechatronic Engineering and Automation, Department of Mechanical Engineering and Automation, No. 149, Yanchang Road, Shanghai 200072, China

Xu Zhang, Dawei Tu

Shanghai University, School of Mechatronic Engineering and Automation, Department of Mechanical Engineering and Automation, No. 149, Yanchang Road, Shanghai 200072, China

Zhan Song

Chinese Academy of Sciences, Shenzhen Institutes of Advanced Technology, Guangdong Provincial Key Laboratory of Robotics and Intelligent System, Guangdong 518055, China

Opt. Eng. 55(10), 104106 (Oct 21, 2016). doi:10.1117/1.OE.55.10.104106
History: Received July 8, 2016; Accepted September 28, 2016
Text Size: A A A

Abstract.  The existing binary defocusing techniques have excellent performance in the measurement speed, while the measurement precision is not high. We propose a mixed binary defocusing method, which combines the respective advantage of one-dimensional modulation defocusing techniques and two-dimensional modulation defocusing techniques. The mixed binary defocusing method adopts the frequency-dependent property of these two kinds of methods to approach the sinusoidal fringe patterns. The optimized pulse width modulation technique is selected to produce high-frequency binary patterns, and the improved error diffusion dithering technique is selected to generate low-frequency patterns. Then the phase-shifting method is adopted to obtain the wrapped phase from the defocused pattern, and the absolute phase is obtained with a multiple-wavelength phase unwrapping method from these wrapped phases at different frequencies. With the standard of the root mean square error of the wrapped phase, different defocusing methods are compared in the simulation. The measurement surfaces are compared in the real object measurement. The results verify the frequency-dependent property of these two kinds of methods and the proposed method has a greater performance than any one binary defocusing technique.

© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Suming Tang ; Xu Zhang ; Dawei Tu and Zhan Song
"Three-dimensional profilometry with mixed binary defocusing technique", Opt. Eng. 55(10), 104106 (Oct 21, 2016). ; http://dx.doi.org/10.1117/1.OE.55.10.104106


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.