Materials, Photonic Devices, and Sensors

Design and fabrication of polymer-based multimode interference optical splitters

[+] Author Affiliations
Yuxin Liang, Mingshan Zhao, Yuqing Luo, Yiying Gu, Yang Zhang, Xiuyou Han, Zhenlin Wu

Dalian University of Technology, School of Physics and Optoelectronic Engineering, No. 2 Linggong Road, Dalian 116024, China

Linghua Wang

Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences, No. 155 Yangqiao Road West, Fuzhou 350002, China

Opt. Eng. 55(11), 117102 (Nov 04, 2016). doi:10.1117/1.OE.55.11.117102
History: Received July 15, 2016; Accepted October 17, 2016
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Abstract.  A polymer-based multimode interference optical splitter chip has been designed and fabricated. Fiber-waveguide coupling loss as well as the structure of the multimode waveguide are optimized in the design to achieve higher performance. A simple UV-based soft nanoimprint lithography (Soft UV-NIL) technique is adopted in the fabrication. Fluorinated acrylate resins, LFR, with different refractive indices are used in this work. Both the residual layer and waveguide deformation are improved by controlling the fabrication processes. An average of 12.98 dB insertion loss is obtained from 1×4 splitters with 1.08 dB uniformity and 0.05 dB polarization-dependent loss. The validity of the polymer optical splitters fabricated through Soft UV-NIL technique is demonstrated by software simulation as well as experimental works.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Yuxin Liang ; Mingshan Zhao ; Yuqing Luo ; Yiying Gu ; Yang Zhang, et al.
"Design and fabrication of polymer-based multimode interference optical splitters", Opt. Eng. 55(11), 117102 (Nov 04, 2016). ; http://dx.doi.org/10.1117/1.OE.55.11.117102


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