Instrumentation, Techniques, and Measurement

Absolute test for cylindrical surfaces using the conjugate differential method

[+] Author Affiliations
Ya Huang, Jun Ma, Weiyuan Sun, Rihong Zhu, Zhishan Gao

Nanjing University of Science and Technology, School of Electronic and Optical Engineering, Xiaolingwei Street 200, Nanjing 210094, China

Caojin Yuan

Nanjing Normal University, Department of Physics, Wenyuan Road 1, Nanjing 210097, China

Christof Pruss, Wolfgang Osten

Universität Stuttgart, Institut für Technische Optik, Pfaffenwaldring 9, Stuttgart 70569, Germany

Mincai Liu

Nanjing University of Science and Technology, School of Electronic and Optical Engineering, Xiaolingwei Street 200, Nanjing 210094, China

Chengdu Fine Optical Engineering Research Center, Keyuan 1st Road 3, Chengdu 610041, China

Opt. Eng. 55(11), 114104 (Nov 15, 2016). doi:10.1117/1.OE.55.11.114104
History: Received August 24, 2016; Accepted October 14, 2016
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Abstract.  An absolute testing method for cylindrical surfaces is presented in a null test setup with a computer-generated hologram. The absolute test exploits the symmetry of cylinders, which allows us to introduce a certain shift of the test surface both parallel to and rotated about the centerline while the null test condition is still maintained. With two shifts of the cylindrical surface, four measurements belonging to two groups in conjugate positions can be accomplished to obtain the absolute differential map with the interferometer and null optics errors removed. The absolute surface can be obtained by wavefront reconstruction from local differential data. A simulation of the method is presented to estimate the error propagation. Experimental absolute test results of a concave cylindrical surface with 100-mm radius are given. The measured profiles are compared with those obtained from a commercial profiler, showing a difference of less than 15 nm (root-mean-square).

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Ya Huang ; Jun Ma ; Caojin Yuan ; Christof Pruss ; Weiyuan Sun, et al.
"Absolute test for cylindrical surfaces using the conjugate differential method", Opt. Eng. 55(11), 114104 (Nov 15, 2016). ; http://dx.doi.org/10.1117/1.OE.55.11.114104


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