Instrumentation, Techniques, and Measurement

Absolute measurement for optical inhomogeneity of parallel plate using phase-shifting interferometry

[+] Author Affiliations
Donghui Zheng, Lei Chen, Qinyuan Sun, Wenhua Zhu, Jianxin Li

Nanjing University of Science and Technology, School of Electronic and Optical Engineering, #200, Xiaolingwei Street, Nanjing 210094, China

Jinpeng Li

Nanjing Astronomical Instruments Co., Ltd., Chinese Academy of Sciences, #6, Huayuan Road, Nanjing 210042, China

Opt. Eng. 55(12), 124103 (Dec 16, 2016). doi:10.1117/1.OE.55.12.124103
History: Received August 30, 2016; Accepted November 17, 2016
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Abstract.  Optical inhomogeneity is an important index to evaluate optical transmission material. We propose an absolute measurement method for optical inhomogeneity of the parallel plate with phase-shifting interferometry (PSI). Compared with the window-flipping method, we introduce another transmission flat and add two cavity measurements between the two transmission flats and the reflective flat with the assistance of a Fizeau interferometer. Simulation and experiment results show that the method can effectively eliminate the disturbances of both surfaces of the parallel plate, the reflective flat, and the system error of the interferometer. It reduces the requirement for surface accuracy of the transmission and reflective flats. It is an absolute measurement method for the optical inhomogeneity of the parallel plate, which can be realized with traditional phase-shifting interferometry.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Donghui Zheng ; Lei Chen ; Qinyuan Sun ; Wenhua Zhu ; Jinpeng Li, et al.
"Absolute measurement for optical inhomogeneity of parallel plate using phase-shifting interferometry", Opt. Eng. 55(12), 124103 (Dec 16, 2016). ; http://dx.doi.org/10.1117/1.OE.55.12.124103


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