Lasers, Fiber Optics, and Communications

Suppression of span in sealed microcavity Fabry–Perot pressure sensors

[+] Author Affiliations
Shivam Mishra, Balasubramaniam Rajappa

Homi Bhabha National Institute, Mumbai 400094, India

Bhabha Atomic Research Centre, Precision Engineering Division, Mumbai 400085, India

Sudhir Chandra

Bennett University, Electronics and Communication Department, Plot No. 8-11, Tech Zone-II, Greater Noida 201310, Uttar Pradesh, India

Opt. Eng. 56(1), 016105 (Jan 06, 2017). doi:10.1117/1.OE.56.1.016105
History: Received September 18, 2016; Accepted December 2, 2016
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Abstract.  Optical microelectromechanical system pressure sensors working on the principle of extrinsic Fabry–Perot (FP) interferometer are designed and fabricated for pressure range of 1-bar absolute. Anodic bonding of silicon with glass is performed under atmospheric pressure to form FP cavity. This process results in entrapment of gas in the sealed microcavity. The effect of trapped gas is investigated on sensor characteristics. A closed-loop solution is derived for the deflection of the diaphragm of a sealed microcavity pressure sensor. Phenomenon of “suppression of span” is brought out. The sensors are tested using white light interferometry technique. The residual pressure of the trapped gas is estimated from the experiments. The developed model has been used to estimate the deflection sensitivity of the free diaphragm and the extent of suppression of span after bonding.

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© 2017 Society of Photo-Optical Instrumentation Engineers

Topics

Sensors

Citation

Shivam Mishra ; Balasubramaniam Rajappa and Sudhir Chandra
"Suppression of span in sealed microcavity Fabry–Perot pressure sensors", Opt. Eng. 56(1), 016105 (Jan 06, 2017). ; http://dx.doi.org/10.1117/1.OE.56.1.016105


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