Optical Design and Engineering

Development of high volume fraction SiCP/Al composite-bismuthate glass metal plus dielectric films optics Au-mirror

[+] Author Affiliations
Bin Wang, Shengguan Qu

South China University of Technology, National Engineering Research Center of Near-Net-Shape Forming for Metallic Materials, Wushan Road 381#, Tianhe District, Guangzhou 510640, China

Xiang-Long Li

South China University of Technology, State Key Laboratory of Luminescent Materials and Devices, Institute of Polymer Optoelectronic Materials and Devices, Wushan Road 381#, Tianhe District, Guangzhou 510640, China

Opt. Eng. 56(1), 015103 (Jan 12, 2017). doi:10.1117/1.OE.56.1.015103
History: Received September 23, 2016; Accepted December 21, 2016
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Abstract.  This paper reports the development of high volume fraction SiCP/Al composite-bismuthate glass multilayer films optics Au-mirror with high reflectivity in a wavelength range of 760 to 1000 nm. Multilayer films were fabricated using an radio frequency-magnetron sputtering deposition system. The measured reflectivity of Ta2O5/SiO2/Au/Cr metal plus dielectric films optics Au-mirror could reach up to 97%. Then, on the basis of experiments, a Φ75-mm high volume fraction SiCP/Al composite-bismuthate glass multilayer optical Au-mirror for a wavelength range of 760 to 1000 nm was manufactured. The tested results indicate that a peak-to-valley value of 0.854λ (λ=632.8  nm) was achieved on the Au-mirror surface, and the slope deviation error for the flat surface was lower than 0.153λ root mean square. The surface roughness of Ta2O5/SiO2/Au/Cr multilayer thin films was 1.30 nm (Ra).

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© 2017 Society of Photo-Optical Instrumentation Engineers

Citation

Bin Wang ; Shengguan Qu and Xiang-Long Li
"Development of high volume fraction SiCP/Al composite-bismuthate glass metal plus dielectric films optics Au-mirror", Opt. Eng. 56(1), 015103 (Jan 12, 2017). ; http://dx.doi.org/10.1117/1.OE.56.1.015103


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