Development of high volume fraction SiCP/Al composite-bismuthate glass metal plus dielectric films optics Au-mirror

Bin Wang; Shengguan Qu; Xiang-Long Li

doi:10.1117/1.OE.56.1.015103

12 January 2017 Development of high volume fraction SiCP/Al composite-bismuthate glass metal plus dielectric films optics Au-mirror

Bin Wang, Shengguan Qu, Xiang-Long Li

Author Affiliations +

Optical Engineering, Vol. 56, Issue 1, 015103 (January 2017). https://doi.org/10.1117/1.OE.56.1.015103

Abstract

This paper reports the development of high volume fraction <inline-formula< <mml:math display="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML"< <mml:mrow< <mml:msub< <mml:mrow< <mml:mi<SiC</mml:mi< </mml:mrow< <mml:mrow< <mml:mi mathvariant="normal"<P</mml:mi< </mml:mrow< </mml:msub< <mml:mo stretchy="false"</</mml:mo< <mml:mi<Al</mml:mi< </mml:mrow< </mml:math< </inline-formula< composite-bismuthate glass multilayer films optics Au-mirror with high reflectivity in a wavelength range of 760 to 1000 nm. Multilayer films were fabricated using an radio frequency-magnetron sputtering deposition system. The measured reflectivity of <inline-formula< <mml:math display="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML"< <mml:mrow< <mml:msub< <mml:mrow< <mml:mi<Ta</mml:mi< </mml:mrow< <mml:mrow< <mml:mn<2</mml:mn< </mml:mrow< </mml:msub< <mml:msub< <mml:mrow< <mml:mi mathvariant="normal"<O</mml:mi< </mml:mrow< <mml:mrow< <mml:mn<5</mml:mn< </mml:mrow< </mml:msub< <mml:mo stretchy="false"</</mml:mo< <mml:msub< <mml:mrow< <mml:mi<SiO</mml:mi< </mml:mrow< <mml:mrow< <mml:mn<2</mml:mn< </mml:mrow< </mml:msub< <mml:mo stretchy="false"</</mml:mo< <mml:mi<Au</mml:mi< <mml:mo stretchy="false"</</mml:mo< <mml:mi<Cr</mml:mi< </mml:mrow< </mml:math< </inline-formula< metal plus dielectric films optics Au-mirror could reach up to <inline-formula< <mml:math display="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML"< <mml:mrow< <mml:mo form="prefix"<≥</mml:mo< <mml:mn<97</mml:mn< <mml:mo<%</mml:mo< </mml:mrow< </mml:math< </inline-formula<. Then, on the basis of experiments, a <inline-formula< <mml:math display="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML"< <mml:mrow< <mml:mi mathvariant="normal"<Φ</mml:mi< <mml:mn<75</mml:mn< <mml:mtext<-</mml:mtext< <mml:mi<mm</mml:mi< </mml:mrow< </mml:math< </inline-formula< high volume fraction <inline-formula< <mml:math display="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML"< <mml:mrow< <mml:msub< <mml:mrow< <mml:mi<SiC</mml:mi< </mml:mrow< <mml:mrow< <mml:mi mathvariant="normal"<P</mml:mi< </mml:mrow< </mml:msub< <mml:mo stretchy="false"</</mml:mo< <mml:mi<Al</mml:mi< </mml:mrow< </mml:math< </inline-formula< composite-bismuthate glass multilayer optical Au-mirror for a wavelength range of 760 to 1000 nm was manufactured. The tested results indicate that a peak-to-valley value of <inline-formula< <mml:math display="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML"< <mml:mrow< <mml:mn<0.854</mml:mn< <mml:mi<λ</mml:mi< </mml:mrow< </mml:math< </inline-formula< (<inline-formula< <mml:math display="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML"< <mml:mrow< <mml:mi<λ</mml:mi< <mml:mo<=</mml:mo< <mml:mn<632.8</mml:mn< <mml:mtext< </mml:mtext< <mml:mi<nm</mml:mi< </mml:mrow< </mml:math< </inline-formula<) was achieved on the Au-mirror surface, and the slope deviation error for the flat surface was lower than <inline-formula< <mml:math display="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML"< <mml:mrow< <mml:mn<0.153</mml:mn< <mml:mi<λ</mml:mi< </mml:mrow< </mml:math< </inline-formula< root mean square. The surface roughness of <inline-formula< <mml:math display="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML"< <mml:mrow< <mml:msub< <mml:mrow< <mml:mi<Ta</mml:mi<

Citation Download Citation

Bin Wang, Shengguan Qu, and Xiang-Long Li "Development of high volume fraction SiCP/Al composite-bismuthate glass metal plus dielectric films optics Au-mirror," Optical Engineering 56(1), 015103 (12 January 2017). https://doi.org/10.1117/1.OE.56.1.015103

Received: 23 September 2016; Accepted: 21 December 2016; Published: 12 January 2017

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