Materials, Photonic Devices, and Sensors

Design and fabrication of silicon-based linear polarizer with multilayer nanogratings operating in infrared region

[+] Author Affiliations
Yu Lin, Jingpei Hu, Bing Cao, Chinhua Wang

Soochow University, College of Physics, Optoelectronics and Energy and Collaborative Innovation Center of Suzhou Nano Science and Technology, 1 Shizi Street, Suzhou 215006, China

Soochow University, Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province and Key Lab of Modern Optical Technologies of Education Ministry of China, 1 Shizi Street, Suzhou 215006, China

Miao Wang

Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, 398 Ruoshui Road, Suzhou 215123, China

Opt. Eng. 56(1), 017111 (Jan 26, 2017). doi:10.1117/1.OE.56.1.017111
History: Received October 30, 2016; Accepted January 4, 2017
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Abstract.  We have proposed and experimentally demonstrated a silicon-based linear polarizer with multilayer nanogratings working in 3 to 5  μm of an infrared region. A dielectric grating is first fabricated in a low-refractive index thin layer on a Si-substrate and then double-layer metallic gratings are formed by evaporating a metallic film onto the dielectric grating. With the designed structure of multilayer nanogratings coupled with a low-refractive-index dielectric layer on the high-refractive index silicon substrate, both high transverse magnetic transmission (TMT) and high extinction ratio (ER) can be effectively achieved across 3- to 5-μm range in the infrared band without the complicated metallic ion etching process that is required in conventional nanowire grids. An ER of 40 dB and TMT of averagely higher than 80% were obtained experimentally from a linear polarizer with a multilayer grating of 280-nm period. The Si-based multilayer grating structure shows possibilities of implementing polarization in a fashion of relatively easy-fabrication, semiconductor process compatible, and high performance.

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© 2017 Society of Photo-Optical Instrumentation Engineers

Citation

Yu Lin ; Jingpei Hu ; Bing Cao ; Miao Wang and Chinhua Wang
"Design and fabrication of silicon-based linear polarizer with multilayer nanogratings operating in infrared region", Opt. Eng. 56(1), 017111 (Jan 26, 2017). ; http://dx.doi.org/10.1117/1.OE.56.1.017111


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