Materials, Photonic Devices, and Sensors

Integrated optical displacement sensor based on asymmetric Mach–Zehnder interferometer chip

[+] Author Affiliations
Ning Zhao, Guang Qian, Xing-Chang Fu, Li-Jiang Zhang, Wei Hu, Ruo-Zhou Li, Tong Zhang

Southeast University, School of Electronic Science and Engineering, School of Instrument Science and Engineering, Joint International Research Laboratory of Information Display and Visualization, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology of Ministry of Education, Nanjing, China

Suzhou Research Institute of Southeast University, Suzhou Key Laboratory of Metal Nano-Optoelectronic Technology, Suzhou, China

Opt. Eng. 56(2), 027109 (Feb 24, 2017). doi:10.1117/1.OE.56.2.027109
History: Received October 27, 2016; Accepted February 6, 2017
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Abstract.  Displacement sensor is one of the most important measuring instruments in many automated systems. We demonstrated an integrated optical displacement sensor based on an asymmetric Mach–Zehnder interferometer chip on a flexible substrate. The sensing chip was made of polymer materials and fabricated by lithography and lift-off techniques. Measured results show that the device has a loss of less than 5 dB and a potential sensitivity of about 0.105  rad/μm with quite a large space for promotion. The sensor has advantages of antielectromagnetic interference, high reliability and stability, simple preparing process, and low cost; it will occupy an important place in displacement sensors.

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© 2017 Society of Photo-Optical Instrumentation Engineers

Citation

Ning Zhao ; Guang Qian ; Xing-Chang Fu ; Li-Jiang Zhang ; Wei Hu, et al.
"Integrated optical displacement sensor based on asymmetric Mach–Zehnder interferometer chip", Opt. Eng. 56(2), 027109 (Feb 24, 2017). ; http://dx.doi.org/10.1117/1.OE.56.2.027109


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