Materials, Photonic Devices, and Sensors

LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging

[+] Author Affiliations
Muhammet Poyraz

Stanford University, Department of Electrical Engineering, Stanford, California, United States

Bilkent University, Department of Electrical and Electronics Engineering, Ankara, Turkey

Kazim Gorgulu, Zulkarneyn Sisman, Ali Kemal Okyay

Bilkent University, Department of Electrical and Electronics Engineering, Ankara, Turkey

Mahmud Yusuf Tanrikulu

Adana Science and Technology University, Department of Electrical-Electronics Engineering, Adana, Turkey

Opt. Eng. 56(3), 037106 (Mar 15, 2017). doi:10.1117/1.OE.56.3.037106
History: Received November 14, 2016; Accepted March 2, 2017
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Abstract.  We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations.

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© 2017 Society of Photo-Optical Instrumentation Engineers

Citation

Muhammet Poyraz ; Kazim Gorgulu ; Zulkarneyn Sisman ; Mahmud Yusuf Tanrikulu and Ali Kemal Okyay
"LWIR all-atomic layer deposition ZnO bilayer microbolometer for thermal imaging", Opt. Eng. 56(3), 037106 (Mar 15, 2017). ; http://dx.doi.org/10.1117/1.OE.56.3.037106


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