Optical Design and Engineering

Absolute measurement method for correction of low-spatial frequency surface figures of aspherics

[+] Author Affiliations
Wei-Cheng Lin

Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan

National Tsing Hua University, Department of Power Mechanical Engineering, Hsinchu, Taiwan

Shenq-Tsong Chang, Cheng-Fang Ho, Ching-Hsiang Kuo, Chien-Kai Chung, Wei-Yao Hsu, Shih-Feng Tseng

Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan

Cheng-Kuo Sung

National Tsing Hua University, Department of Power Mechanical Engineering, Hsinchu, Taiwan

Opt. Eng. 56(5), 055101 (May 27, 2017). doi:10.1117/1.OE.56.5.055101
History: Received December 18, 2016; Accepted May 9, 2017
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Abstract.  An absolute measurement method involving a computer-generated hologram to facilitate the identification of manufacturing form errors and mounting- and gravity-induced deformations of a 300-mm aspheric mirror is proposed. In this method, the frequency and magnitude of the curve graph plotted from each Zernike coefficient obtained by rotating the mirror with various orientations about optical axis were adopted to distinguish the nonrotationally symmetric aberration. In addition, the random ball test was used to calibrate the rotationally symmetric aberration (spherical aberration). The measured absolute surface figure revealed that a highly accurate aspheric surface with a peak-to-valley value of 1/8 wave at 632.8 nm was realized after the surface figure was corrected using the reconstructed error map.

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© 2017 Society of Photo-Optical Instrumentation Engineers

Citation

Wei-Cheng Lin ; Shenq-Tsong Chang ; Cheng-Fang Ho ; Ching-Hsiang Kuo ; Chien-Kai Chung, et al.
"Absolute measurement method for correction of low-spatial frequency surface figures of aspherics", Opt. Eng. 56(5), 055101 (May 27, 2017). ; http://dx.doi.org/10.1117/1.OE.56.5.055101


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