Materials, Photonic Devices, and Sensors

Infrared properties of sol–gel derived zirconia film

[+] Author Affiliations
Itsunari Yamada

University of Shiga Prefecture, School of Engineering, Department of Electronic Systems Engineering, Shiga, Japan

University of Shiga Prefecture, Center for Glass Science and Technology, School of Engineering, Shiga, Japan

Hiroki Torii, Yoshiro Ishihara

University of Shiga Prefecture, School of Engineering, Department of Electronic Systems Engineering, Shiga, Japan

Opt. Eng. 56(7), 077104 (Jul 12, 2017). doi:10.1117/1.OE.56.7.077104
History: Received March 10, 2017; Accepted June 21, 2017
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Abstract.  We examined infrared transmission characteristics of a sol–gel derived zirconia film and the antireflective (AR) effect of this film for an Si substrate in the midinfrared region. The surface reflection loss of an Si plate is high (30%) because of the high refractive index (3.42) in the infrared region. We employed zirconia nanoparticle dispersion with 15 wt. % (1-butanol solvent) as starting sol solution. Then, the dispersion was coated with Si substrate at a spin-coating speed of 2000 rpm, and the substrate was heated to 150°C. The number of coatings was repeated seven times. As a result, the transmittance at 5.6-μm wavelength was enhanced to 66.2%, and we found that the coated film worked efficiently as the AR film up to 10-μm wavelength. Additionally, by heating the substrate to 800°C, the large absorptions at 2.9-, 6.4-, and 6.9-μm wavelengths could be suppressed because the hydroxy group in the film was reduced. Its peak transmittance was 67.9% at 4.9-μm wavelength.

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© 2017 Society of Photo-Optical Instrumentation Engineers

Citation

Itsunari Yamada ; Hiroki Torii and Yoshiro Ishihara
"Infrared properties of sol–gel derived zirconia film", Opt. Eng. 56(7), 077104 (Jul 12, 2017). ; http://dx.doi.org/10.1117/1.OE.56.7.077104


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