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17 March 2023 Laser implantation of plasmonic nanoparticles for photoluminescence enhancement of silicon quantum dots
Lukas Janos Richter, Jürgen Ihlemann
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Proceedings Volume PC12410, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2023; PC124100L (2023) https://doi.org/10.1117/12.2650055
Event: SPIE LASE, 2023, San Francisco, California, United States
Abstract
Laser implantation can be used for the incorporation of metal nanoparticles into a dielectric matrix. To this end, a thin gold coating on a silicon suboxide (SiOx, x < 2) film is irradiated with a nanosecond laser resulting in the formation of gold nanoparticles in this SiOx-film. By thermal treatment, Si quantum dots are formed by a phase separation of SiOx into Si and SiO2. These Si quantum dots exhibit visible-NIR photoluminescence, which is significantly enhanced through the coupling with the nearby plasmonic gold particles. A more than twofold enhancement is obtained.
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Lukas Janos Richter and Jürgen Ihlemann "Laser implantation of plasmonic nanoparticles for photoluminescence enhancement of silicon quantum dots", Proc. SPIE PC12410, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2023, PC124100L (17 March 2023); https://doi.org/10.1117/12.2650055
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KEYWORDS
Quantum dot light emitting diodes
Silicon
Nanoparticles
Plasmonics
Luminescence
Gold
Quantum dots
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