Novel V-groove Structures On Silicon

S. Sriram

doi:10.1117/12.950752

11 September 1985 Novel V-groove Structures On Silicon

S. Sriram

Proceedings Volume 0578, Integrated Optical Circuit Engineering II; (1985) https://doi.org/10.1117/12.950752
Event: 1985 Cambridge Symposium, 1985, Cambridge, United States

Abstract

We report the fabrication of novel V-groove structures by etching silicon twice in an anisotropic etch solution. This technique is capable of yielding micron size patterns from large patterns. For example, we have been able to reduce a 7 μm pattern down to 1 μm. This technique finds useful application in novel diffracting grating structures.

Citation Download Citation

S. Sriram "Novel V-groove Structures On Silicon", Proc. SPIE 0578, Integrated Optical Circuit Engineering II, (11 September 1985); https://doi.org/10.1117/12.950752

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