Thin-film Photodetectors For Integrated Optics

M. L. McWright; T. E. Batchman; R. F. Carson

doi:10.1117/12.950746

11 September 1985 Thin-film Photodetectors For Integrated Optics

M. L. McWright, T. E. Batchman, R. F. Carson

Proceedings Volume 0578, Integrated Optical Circuit Engineering II; (1985) https://doi.org/10.1117/12.950746
Event: 1985 Cambridge Symposium, 1985, Cambridge, United States

Abstract

Metal-silicon-metal cladding layers on dielectric waveguides exhibit coupling and absorption characteristics which make them useful as high-efficiency thin-film photodetectors for integrated optical applications. Periodic coupling between the guided mode of the lossless waveguide and the lossy modes supported by the semiconductor cladding produces an oscillatory behavior as the semiconductor thickness is increased. A high level of energy transfer from the waveguide to the semiconductor can be obtained, thereby maximizing detector absorption.

Citation Download Citation

M. L. McWright, T. E. Batchman, and R. F. Carson "Thin-film Photodetectors For Integrated Optics", Proc. SPIE 0578, Integrated Optical Circuit Engineering II, (11 September 1985); https://doi.org/10.1117/12.950746

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