Optical profilometer

Aleksandra Wieloszyńska; Marcin Strąkowski

doi:10.1117/12.2248123

28 September 2016 Optical profilometer

Aleksandra Wieloszyńska, Marcin Strąkowski

Proceedings Volume 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016; 100310U (2016) https://doi.org/10.1117/12.2248123
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, 2016, Wilga, Poland

Abstract

The profilometry plays a huge role in the most fields of science and technology. It allows to measure the profile of the surface with high-resolution. This technique is used in the fields like optic, electronic, medicine, automotive, and much more. The aim of the current work was to design and build optical profilometer based on the interference phenomena. The developed device has been working with He-Ne laser (632.8 nm). The optical parts have been chosen in order to reach the sized 2.0 mm x 1.6 mm of scanning area. The setup of the profilometer is based on Twyman-Green interferometer. Therefore, the phase distribution of the backreflected light from measured surface is recorded. The measurements are carried out with the aid of multiframe algorithms. In this approach we have used the Hariharan algorithm to obtain the exact value of the recorded phase. During tests, which have been carried out in order to check the functionality of the device, the interference patterns have been recoded and processed in order to obtain the 3D profile of measured surface. In this contribution the setup of the optical system, as well as signal processing methods are going to be presented. The brief discussion about the advantages and disadvantages, and usefulness of this approach will be carried out.

Citation Download Citation

Aleksandra Wieloszyńska and Marcin Strąkowski "Optical profilometer", Proc. SPIE 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016, 100310U (28 September 2016); https://doi.org/10.1117/12.2248123

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