Instrumental Effects In Surface Finish Measurement

E. L. Church; P. Z. Takacs

doi:10.1117/12.949154

21 March 1989 Instrumental Effects In Surface Finish Measurement

E. L. Church, P. Z. Takacs

Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949154
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

The derivation of surface-finish statistics from profile measurements are reviewed with emphasis on the corrections and limitations imposed by the measurement process itself. These issues are important for the comparison of the results of different types of measurements, connecting results with functional surface properties, and evaluating different finishing techniques.

Citation Download Citation

E. L. Church and P. Z. Takacs "Instrumental Effects In Surface Finish Measurement", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); https://doi.org/10.1117/12.949154

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