Measurement Of The Profiles Of 'Super-Smooth' Surfaces Using Optical Interferometry

M. J. Downs; N. M. Mason; J. C. C. Nelson

doi:10.1117/12.949149

21 March 1989 Measurement Of The Profiles Of 'Super-Smooth' Surfaces Using Optical Interferometry

M. J. Downs, N. M. Mason, J. C. C. Nelson

Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949149
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Interferometers are widely used for measuring the profiles of 'super-smooth' surfaces. The most sensitive of these instruments employ a 'common-path' design with the two interfering beams being reflected from different areas of the test surface, making the interferometer insensitive to vertical motion of the surface. When these systems are applied to the measurement of surface 'roughness' the shortest surface wavelength that can be measured depends upon both the wavelength of the measurement radiation and the numerical aperture of the probe beam optics. The longest surface wavelength depends upon the optical configuration of the interferometer. A profiling interferometer will be briefly described that has a sensitivity to surface height of better than 0.01 nm and a surface wavelength range from 0.5 to 15 micrometres. The results of measurements on a number of surfaces using this instrument will be shown and the methods used for analysing these will be discussed.

Citation Download Citation

M. J. Downs, N. M. Mason, and J. C. C. Nelson "Measurement Of The Profiles Of 'Super-Smooth' Surfaces Using Optical Interferometry", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); https://doi.org/10.1117/12.949149

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available