Photon Tunneling Microscopy

John M. Guerra

doi:10.1117/12.949177

21 March 1989 Photon Tunneling Microscopy

John M. Guerra

Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949177
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

An evanescent field arising from photons tunneling through a total internal reflection boundary is employed as a high vertical resolution (less than 1 nm, detector-limited) height transducer which maps sample microtopography into a grayscale imagespace. A video densitometer and xyz oscilloscope restore the grayscale image to a 3D topographic image; restoration and viewing perspective manipulation are real-time. Depth of field is about 1 µm and lateral resolution is typical to an oil immersion microscope (about 0.4 µm).

Citation Download Citation

John M. Guerra "Photon Tunneling Microscopy", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); https://doi.org/10.1117/12.949177

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