Study of TLIPSS formation on different metals and alloys and their selective etching

Alexandr V. Dostovalov; Victor P. Korolkov; Vadim S. Terentiev; Konstantin A. Okotrub; Fedor N. Dultsev; Anton Nemykin; Sergey A. Babin

doi:10.1117/12.2251341

17 February 2017 Study of TLIPSS formation on different metals and alloys and their selective etching

Alexandr V. Dostovalov, Victor P. Korolkov, Vadim S. Terentiev, Konstantin A. Okotrub, Fedor N. Dultsev, Anton Nemykin, Sergey A. Babin

Author Affiliations +

Proceedings Volume 10092, Laser-based Micro- and Nanoprocessing XI; 100921H (2017) https://doi.org/10.1117/12.2251341
Event: SPIE LASE, 2017, San Francisco, California, United States

Abstract

Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period ≈λ) and thermochemical (with period ≈λ) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.

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Alexandr V. Dostovalov, Victor P. Korolkov, Vadim S. Terentiev, Konstantin A. Okotrub, Fedor N. Dultsev, Anton Nemykin, and Sergey A. Babin "Study of TLIPSS formation on different metals and alloys and their selective etching", Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 100921H (17 February 2017); https://doi.org/10.1117/12.2251341

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